Figure 3

Temperature dependence of resonator properties. a) Internal quality factor \(Q_{i}\) as a function of temperature. b) Relative frequency shift \(\delta f_{r}=(f_{r}(T)-f_{r}(0))\) as a function of temperature. The inset is a zoom in onto the peak that is observed at ∼ 0.5 K. In all sub-figures, the color encodes the dielectric configuration according to Fig. 1b) and legend in Fig. 2. The data was acquired at an average photon number of ∼10⁴