Figure 10

Renders of the device designs: (a) Sample A with uniform w and s for each CPW resonator type. (b) Detail of an inter-chip coupler between a feedline and a resonator. (c) Sample B with swept w and s for each CPW resonator type. In all images, niobium is shown as light gray on the bottom chip and darker gray on the top chip. Areas of exposed silicon on the bottom chip are rendered in light blue while equivalent areas on the top chip are rendered in magenta. Indium bumps are rendered in green and SU-8 spacers are rendered in yellow