Figure 13From: Improved parameter targeting in 3D-integrated superconducting circuits through a polymer spacer processResonator internal quality factor as a function of internal photon number. (a) Sample A1. (b) Planar (P1 and P2) samples as well as a 3D-integrated sample without spacers (S1). (c) Sample B1. Vertical bars at each point represent the uncertainty of the fitBack to article page