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EPJ Quantum Technology
Figure 14 | EPJ Quantum Technology

Figure 14

From: Improved parameter targeting in 3D-integrated superconducting circuits through a polymer spacer process

Figure 14

Meshing of the participation-ratio simulations. Gray is bulk substrate, green is metal—substrate interface, red is metal—vacuum interface, and yellow is substrate—vacuum interface region. The mesh triangles are outlined in blue. The inset presents a detailed view of the 10 nm interface region near the lower corner of the CPW metal where the electric-field is highest

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