Figure 3

3D-integrated resonator frequency reproducibility. (a) Measured frequencies of a set of metal-facing resonators vs. inverse physical length from multiple copies of the same design (plotted separately as An, see legend) with 5 μm wide center conductors. The lower-right inset is a schematic cross-section of the layout of the CPW line with silicon in gray and niobium in black (not to scale). (b) Differences between the measured frequencies and the mean measured per-resonator frequency for the data in (a). (c) Measured frequency and (d) differences from mean per-resonator frequency vs. inverse length from the dielectric-facing resonators. The light gray lines in (a,c) are best-fit lines to a simple model discussed in the text