Figure 4
Analysis of 3D-integrated resonator quality factors. (a) Distribution of single-photon internal quality factors for 16, \(w=5.0\text{ }\upmu \text{m}\), CPW resonators on one device. (b) Internal quality factor vs. CPW center conductor width, w, for both metal and dielectric-facing resonators. A logarithmic x-axis scale is used for visual clarity. The pink region indicates the mean and one standard deviation interval for the planar CPW resonators with \(w=10\text{ }\upmu \text{m}\) and aq. HF treatment prior to cooldown. The dashed lines are the result of participation-ratio analysis of the different geometries