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Table 2 CPW resonator parameters of design A. Resonator indices increase from left to right along the feedline; 0 to 7 refer to the metal-facing resonators on the upper feedline while 8 to 15 refer to the dielectric-facing resonators on the lower feedline. w: center conductor width, s: gap width, : physical length, \(\langle \omega _{\mathrm{m}} \rangle \): mean measured resonance frequency

From: Improved parameter targeting in 3D-integrated superconducting circuits through a polymer spacer process

Index

w [μm]

s [μm]

[μm]

\(\langle \omega _{\mathrm{m}} \rangle /2\pi \) [GHz]

0

5.00

3.24

6049.8

4.9729

1

5.00

3.24

5816.1

5.1724

2

5.00

3.24

5599.7

5.3748

3

5.00

3.24

5398.7

5.5797

4

5.00

3.24

5211.6

5.7865

5

5.00

3.24

5037.0

5.9921

6

5.00

3.24

4873.7

6.1990

7

5.00

3.24

4720.5

6.3988

8

5.00

3.14

6749.1

4.3347

9

5.00

3.14

6447.9

4.5386

10

5.00

3.14

6172.4

4.7407

11

5.00

3.14

5919.4

4.9423

12

5.00

3.14

5686.2

5.1448

13

5.00

3.14

5470.6

5.3458

14

5.00

3.14

5270.7

5.5467

15

5.00

3.14

5082.8

5.7475